Hydrogen Sensing Properties of Pt/Lanthanum Oxide-Molybdenum Oxide Nanoplatelet/SiC Based Schottky Diode

摘要

An investigation of the electrical and hydrogen sensing properties of a novel Schottky diode based on a nanostructured lanthanum oxide-molybdenum oxide compound is presented herein. Molybdenum oxide (MoO_3) nanoplatelets were grown on SiC substrates via thermal evaporation which was then subsequently coated with lanthanum oxide (La_2O_3) by RF sputtering. The current-voltage characteristics and hydrogen sensing performance (change in barrier height and sensitivity as well as the dynamic response) were examined from 25 to 300°C. At 180°C, a voltage shift of 2.23V was measured from the sensor while exposed to 1% hydrogen gas under a 100 μA constant reverse bias current. The results indicate that the presence of a La_2O_3 thin layer substantially improves the hydrogen sensitivity of the MoO_3 nanoplatelets.