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Capillary Self-alignment Dynamics for R2R Manufacturing of Mesoscopic System-in-foil Devices

机译:用于介绍系统内铝箔装置R2R制造的毛细管自对准动力学

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This paper reports a study on the dynamics of foil-based functional component self-alignment onto patterned test substrates and its demonstration when integrating a flexible sensor onto a printed circuitry. We investigate the dependence of alignment time and final precision of stacking of mm-and cm-sized foil dies on a number of system parameters, such as amount of assembly medium dispensed on target positions, size and weight of assembling dies and their initial misalignment. Using water as a medium for direct self-alignment, mm-and cm-sized square-shaped pre-marked foil dies were aligned with accuracy down to 30 μm and smaller, which reflects a high precision relatively to their lateral dimensions on patterned marked carriers. High-speed camera stage and image recognition tools were used for analyzing rapid capillary-driven self-alignment processes of marked foil dies. It is shown that there is a definite range of initial misalignment values allowing dies to align with high accuracy and yield within the same time window, whereas both under smaller and larger initial offsets, i.e. with dies correspondingly too close or too far from their target positions, yield and alignment precision is significantly lower. The high-alignment accuracy of mm-to cm-sized functional foils was demonstrated by means of the integration of an interdigitated electrodes (IDE) capacitive sensor to a flexible polymeric substrate. Additionally, high-yield electrical interconnection was performed using anisotropic conductive adhesives (ACA). The latter opens the perspective of efficiently assembling interesting new systems such as separately manufactured sensors, paper batteries and RFIDs components through the direct capillary-driven self-alignment approach and ACA electrical interconnection.
机译:本文报告了关于将柔性传感器集成到印刷电路上的图案化测试基板上的箔基功能部件自对准的动态研究及其演示。我们研究了对准时间的依赖性和堆叠MM和CM大小的箔的最终精确性在许多系统参数上模具,例如分配在组装模具的目标位置,尺寸和重量上的装配介质的量及其初始未对准。用水作为直接自对准的介质,MM和CM尺寸方形的预标标箔管芯管芯管芯,精度下降至30μm,更小,这反映了在图案标记载体上相对较高的横向尺寸的高精度。高速摄像机阶段和图像识别工具用于分析标记箔模具的快速毛细管驱动自对准过程。结果表明,允许模具在同一时间窗口内以高精度和产量对准,而在较小且较大的初始偏移下,即,与它们的目标位置相应地过于靠近或太远的初始偏移,均在较小和更大的初始偏移下对准。 ,产量和对准精度显着降低。通过将交叉的电极(IDE)电容传感器的整合到柔性聚合物基板的整合来证明MM-to CM尺寸的功能箔的高对准精度。另外,使用各向异性导电粘合剂(ACA)进行高屈服电互连。后者通过直接毛细管驱动的自对准方法和ACA电互连,有效地组装有效地组装有趣的新系统,例如单独制造的传感器,纸电池和RFID组件。

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