Study on Crystalline Volume Fraction and Activation Energy for Silicon Thin Film Prepared by VHF-PECVD

机译：VHF-PECVD制备的硅薄膜晶体体积分数和活化能的研究

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Intrinsic microcrystalline silicon thin film were prepared by VHF-PECVD, the activation energy of thin film were measured by activation energy testing equipment. The activation energy of samples with different crystalline volume fraction were studied. The results showed that: the activation energy of samples deposited at amorphous/microcrystalline transition zone decreases crystalline volume fraction increasing.

机译：通过VHF-PECVD制备本征微晶硅薄膜，通过激活能量检测设备测量薄膜的活化能。研究了具有不同结晶体积分数的样品的活化能。结果表明：在无定形/微晶过渡区沉积的样品的激活能量降低了结晶体积分数增加。

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《International Conference on Energy and Environmental Protection》|2017年|744-1490p|共5页
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作者
Qingdong Chen; Junping Wang;
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中图分类 TK01-53;
关键词
VHF-PECVD; Microcrystalline silicon; Activation energy; Crystalline volume fraction;

机译：VHF-PECVD;微晶硅;活化能量;结晶体积分数;

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1. Activation energy study of intrinsic microcrystalline silicon thin film prepared by VHF-PECVD [J] . Chen Qingdong, Wang Junping, Zhang Yuxiang, Optik: Zeitschrift fur Licht- und Elektronenoptik: = Journal for Light-and Electronoptic . 2016,第18期

机译：VHF-PECVD制备本征微晶硅薄膜的活化能研究
2. A Novel Method to Make Boron-Doped Microcrystalline Silicon Thin Films with Optimal Crystalline Volume Fraction for Thin Films Solar Cell Applications [J] . Chonghoon Shin, Jinjoo Park, Sangho Kim, Journal of nanoscience and nanotechnology . 2014,第12期

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3. Effect of HCl addition on the crystalline fraction in silicon thin films prepared by hot-wire chemical vapor deposition [J] . Chung Yung-Bin, Lee Dong-Kwon, Kim Chan-Soo, Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2009,第12期

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4. Study on Crystalline Volume Fraction and Activation Energy for Silicon Thin Film Prepared by VHF-PECVD [C] . Qingdong Chen, Junping Wang International Conference on Energy and Environmental Protection . 2017

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Study on Crystalline Volume Fraction and Activation Energy for Silicon Thin Film Prepared by VHF-PECVD

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