Deposition of BaZr_(0.10)Ti_(0.90)O_3 Thin Films Doped Strontium by Sol Gel Method

摘要

Depositions of BaZr_(0.10)Ti_(0.90)O_3 and BaZr_(0.10)Ti_(0.90)O_3 thin films doped with strontium (Sr) have been growth on Pt/Si substrate using the sol gel method prepared with spin coater. Mole percent of Sr is varied to 1%, 3% and 5%, repectively. The characterization of its micro structure showed that the diffraction angle is shifted to the right if the mole percent of the Sr doped is increased. We found that the particle size of BZT with Sr dopant is bigger than BZT without dopant Sr as shown in the morphological characterization result. The thickness of BaZr_(0.10)Ti_(0.90)O_3 and BaZr_(0.10)Ti_(0.90)O_3 thin films doped with Sr are about 400 nm. The obtained hysteresis curves of BaZr_(0.10)Ti_(0.90)O_3 and BaZr_(0.10)Ti_(0.90)O_3 thin films shown that the saturation values are similar to each other, however the remnant polarization and coercive field geting smaller along with the increasing of mole percent of Sr dopant.