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Ag sinter joining and wiring for high power electronics

机译:AG烧结加入和接线高功率电子

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Sinter joining with Ag particle pastes has attracted much attention for wide band gap power assembly that requires high power and high temperature interconnection technology. The micron/submicron Ag particle hybrid paste, which is affordable with excellent performance, is one of the promising materials. Bonding conditions are very much mild such as 250°C, low pressure less than 1 MPa and air atmosphere. The metallization layer structure was evaluated by changing interlayer structures. The SiC die-attached on a DBC structure (Cu/Si_3N_4/Cu) with the Ag hybrid paste exhibits excellent stability at 250°C up to 1,000 hours in air, when a suitable layer structure was selected. Shear strength over 30 MPa was maintained. It was found that the interfaces both of a Ag layer and DBC and of SiC die and a Ag layer must be protected to prevent severe oxidation. A barrier layer of Ti was found to be effective to stop oxidation of the metallization such as Cu and Ni. Severe thermal cycling between -40°C and 250°C decreased strength while good strength beyond 10 MPa was maintained up to 1,000 cycles in air. The Ag hybrid paste can be also applied for wiring instead of Al or Cu wire-bonding. 3D printing of Ag hybrid paste provides heat-resistant wiring for SiC assembly. Microstructures and selected properties will be demonstrated.
机译:与Ag粒子糊涂的烧结加入已经吸引了需要高功率和高温互连技术的宽带隙功率组件的许多关注。微米/亚微米颗粒杂交浆料,其具有优异的性能,是有前途的材料之一。粘合条件非常温和,如250°C,低压小于1MPa和空气气氛。通过改变层间结构来评估金属化层结构。 The SiC die-attached on a DBC structure (Cu/Si_3N_4/Cu) with the Ag hybrid paste exhibits excellent stability at 250°C up to 1,000 hours in air, when a suitable layer structure was selected.维持超过30MPa的剪切强度。发现必须保护AG层和DBC和SiC模具和AG层的接口以防止严重氧化。发现Ti的阻挡层有效地停止氧化如Cu和Ni的金属化。在-40°C和250℃之间的严重热循环降低强度,而良好的强度超过10MPa在空气中保持高达1,000个循环。 AG杂交浆料也可以应用于布线而不是Al或Cu引线键合。 AG混合膏的3D印刷为SiC组装提供耐热布线。将对微结构和所选性能进行说明。

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