The Design and Testing of Mesopiezoresistive Effect Electromagnetic Driven Micromachined Gyroscope

摘要

Resonant tunneling diode (RTD) is a bipolar negative resistance device with the features of high speed, high frequency, low voltage and power, has been proved to have mesopiezoresistive effect, and the current-voltage characteristics of RTD is a function of stress. In the paper, the mesopiezoresistive effect of resonant tunneling diodes and Coriollis effect are both used in the research of gyroscope, so a novel gyroscope structure is proposed. The feasible fabrication process is designed according to present process technology, and the gyroscope is fabricated by GaAs surface micromachining processes and bulk micromachining technology. By the driven experiment it is verify that the gyroscope can be successfully driven. And the range of fabricated gyroscope natural frequency is also obtained, which is larger than 4KHz.