In this work, micro polishing by ultrasonic wave with micro-particle slurry was studied to improve the surface roughness of micro parts. The 316L micro two step gear was fabricated by powder injection molding and ultrasonic polishing was carried out applying ultrasonic wave to alumina and silica slurry. The final surface roughness depended primarily on initial roughness of the sintered part and the roughness decreased from 4 um to 220 nm after polishing for 10 hrs. Also, polishing time was decreased with increase of slurry particle size. In case using alumina slurry of 1 μm, the roughness of 240 nm was achieved after polishing for 12 hrs whereas in case of 8 μm silica, it took only 3 hrs to roughness of about 290 nm. As a result, it is proposed strongly that ultrasonic polishing using only abrasive slurry is perfectly possible to be applicable to polishing micro features to improve surface roughness.
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