We present a compact, vibration insensitive interferometer design that is well suited for measuring optics while mounted in-situ on polishing equipment. The system employs a single frame phase sensor that permits acquisition in tens of microseconds to mitigate the effects of vibration or relative motion with the test part. The theory of operation is presented along with experimental test results, which characterize repeatability and precision under static and high-vibration conditions. The vibration frequency response of the interferometer is assessed. In addition, Theoretical and measured instrument spatial resolution (instrument transfer function) and retrace error are compared. We also present preliminary measurements made with a prototype system mounted in a commercial polishing machine.
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