The Surface Morphology of Diamond Films by Hot Cathode DC-PCVD

摘要

This The equipment and experimental conditions which prepared diamond films by hot cathode DC-PCVD were introduced in this paper. The surface morphology of diamond film samples are discussed when the Methane flow rates was 2sccm, 4sccm, 6sccm and 8scc , the Ethanol flow rates was 50sccm, 60sccm, 70sccm and 100sccm , the Methanol flow rates was 2sccm, 6sccm and 10sccm , the substrate temperature was 1000 °C, current of 9A . The surface morphology of diamond film samples were discussed when the substrate temperature was 800 °C, 900°C, 1000 °C and 1100 °C. Finally, the conclusions was obtained.