Cold cathode fabricating method for e.g. fabricating X-ray tube, involves sending beam comprising controlled multicharged positive ions towards surface of diamond like carbon film such that ions modify film in permanent manner

摘要

The method involves depositing thin diamond like carbon film on a conductor substrate, producing multicharged positive ions (1) and providing a controlled kinetic energy to the ions. A beam comprising several controlled ions is sent in vacuum towards a surface (2) of the film such that each ion structurally modifies the film in a permanent manner by provoking local formation of a nanometric dimension structure (3). The film surface irradiated with the ions is exposed to an electric field in the vacuum. An independent claim is also included for a diamond like carbon surface irradiated with multi-charged ions according to cold cathode fabricating method.