The surface morphology of diamond films by hot cathode DC-PCVD

摘要

This The equipment and experimental conditions which prepared diamond films by hot cathode DC-PCVD were introduced in this paper. The surface morphology of diamond film samples are discussed when the Methane flow rates was 2sccm, 4sccm, 6sccm and 8scc, the Ethanol flow rates was 50sccm, 60sccm, 70sccm and 100sccm, the Methanol flow rates was 2sccm, 6sccm and 10sccm, the substrate temperature was 1000 °C, current of 9A. The surface morphology of diamond film samples were discussed when the substrate temperature was 800°C, 900 °C, 1000 °Cand 1100 °C. Finally, the conclusions was obtained.