Simulation Research on Elastic Constant and Natural Frequency of NCD Coated AFM Probes

摘要

In this work, the elastic constant and natural frequency of NCD and non-NCD coated AFM probes were simulated using ANSYS. The results indicated that after depositing 1 ~2μm thick NCD films on the silicon probes, the elastic constant and natural frequency were both increased, yet within the prescribed limit: when the cantilevers had the same total thicknesses (3μm, 3.5μm and 4um), the elastic constant and the natural frequency of the NCD coated probes were increased by 96% ~ 107% and 28%~30% respectively, compared with the silicon probes.