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Structural and microfluidic analysis of MEMS based out-of-plane hollow silicon microneedle array for drug delivery

机译:基于MEMS的结构和微流体分析,用于药物递送的平面外空心硅微针阵列

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Microneedles are gaining popularity because of the ability to deliver the drug through the skin at desire therapeutic range. In this paper, design, structural analysis and fabrication of tapered tip out-of-plane hollow silicon microneedle array for transdermal drug delivery (TDD) applications is first presented. Then computational fluid dynamic (CFD) static analysis is presented to investigate the pressure distribution and velocity distribution of fluid through 5 × 5 microneedle array. The static pressure 10 kPa to 130 kPa was applied for fluidic analysis. Inductively coupled plasma (ICP) etcher machine is used to facilitate the isotropic and anisotropic etching process during the fabrication. Finite element method (FEM) using ANSYS rather than analytical system has been used to perform the simulation. The effect of axial and transverse loads on the microneedles during skin insertion is investigated in the stress analysis. The analysis predicts that the resultant stresses due to applied bending and axial loads are in the safe range. The presented research work provides predicted data to fabricate optimized designs of silicon microneedle array for biomedical applications.
机译:微针在趋势上获得普及,因为能够通过在欲望治疗范围内通过皮肤递送药物。本文首先介绍了用于透皮药物递送(TDD)应用的锥形尖端外空心硅微针阵列的设计,结构分析和制造。然后,提出了计算流体动态(CFD)静态分析,以研究流体通过5×5微针阵列的压力分布和速度分布。施加静压10kPa至130kPa以进行流体分析。电感耦合等离子体(ICP)蚀刻机用于促进在制造过程中的各向同性和各向异性蚀刻工艺。使用ANSYS而不是分析系统的有限元方法(FEM)用于执行模拟。在应力分析中研究了在皮肤插入期间微针在微针上的轴向和横向载荷的影响。分析预测,由于施加的弯曲和轴向载荷引起的所得应力在安全范围内。本研究工作提供了预测数据,以制造用于生物医学应用的硅片阵列的优化设计。

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