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Structural and microfluidic analysis of MEMS based out-of-plane hollow silicon microneedle array for drug delivery

机译:基于MEMS的平面外空心硅微针阵列的结构和微流控分析

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Microneedles are gaining popularity because of the ability to deliver the drug through the skin at desire therapeutic range. In this paper, design, structural analysis and fabrication of tapered tip out-of-plane hollow silicon microneedle array for transdermal drug delivery (TDD) applications is first presented. Then computational fluid dynamic (CFD) static analysis is presented to investigate the pressure distribution and velocity distribution of fluid through 5 × 5 microneedle array. The static pressure 10 kPa to 130 kPa was applied for fluidic analysis. Inductively coupled plasma (ICP) etcher machine is used to facilitate the isotropic and anisotropic etching process during the fabrication. Finite element method (FEM) using ANSYS rather than analytical system has been used to perform the simulation. The effect of axial and transverse loads on the microneedles during skin insertion is investigated in the stress analysis. The analysis predicts that the resultant stresses due to applied bending and axial loads are in the safe range. The presented research work provides predicted data to fabricate optimized designs of silicon microneedle array for biomedical applications.
机译:由于能够在所需的治疗范围内将药物通过皮肤输送,微针正变得越来越流行。在本文中,首先介绍了用于经皮药物输送(TDD)应用的锥形尖端面外空心硅微针阵列的设计,结构分析和制造。然后提出了计算流体动力学(CFD)静态分析,以研究通过5×5微针阵列进行的流体压力分布和速度分布。施加10 kPa至130 kPa的静压进行流体分析。电感耦合等离子体(ICP)蚀刻机用于在制造过程中促进各向同性和各向异性蚀刻工艺。使用ANSYS而不是分析系统的有限元方法(FEM)已用于执行仿真。在应力分析中研究了轴向和横向载荷对皮肤插入过程中微针的影响。分析预测,由于施加的弯曲和轴向载荷而产生的合应力在安全范围内。提出的研究工作为生物医学应用的硅微针阵列的优化设计提供了预测数据。

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