Surface profile measurement of KB mirrors using Fizeaulaser interferometer

摘要

Fizeau interferometer is the most commonly used interferometer for testing optical components. The aim of this work is to apply this technique to the measurement of elliptical Kirkpatrick–Baez (KB) mirrors during their fabrication process. KB mirrors are widely used at synchrotron radiation facilities around the world for x-ray focusing. Fizeau interferometer can provide accurate measurements for KB mirrors. Recently a KB mirror that can focus X-ray down to 150 nm has been fabricated in the Argonne National Laboratory.