Microstructure and mechanical characteristics of the CrN/Si_3N_4 multilayered films prepared by sputtering

摘要

Multilayers of CrN/Si_3N_4 coatings were prepared by magnetron sputtering on die steel substrates. The layers of CrN/Si_3N_4 films were varied to investigate their effects on microstructure, morphology, nano-hardness properties determined by X-ray diffraction, field-emission scanning electron microscope (FE-SEM), nanoindentation, and pin-on-disk, respectively. The result shows that CrN has highly (111) preferred orientation and Si_3N_4 exhibits amorphous phase at working temperature of 200°C. The surface of coatings revealed smaller grains and uniform dense with higher layers. The number of layers increased with enhancing of the mechanical properties, and hardness values. At 64 layers films had the largest nano-hardness. Besides, the highest layers of CrN/Si_3N_4 multilayers have been achieved the lowest friction coefficient for against steel ball.