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Design and Fabrication of Electromechanical Tweezers based on CNT Ropes

机译:基于CNT绳索的机电镊子的设计与制造

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This paper deals with the design, modeling, fabrication and electrical characterization of electromechanical tweezers fabricated with carbon nanotubes (CNT) ropes. We used vertically grown multi walled carbon nanotubes (MWCNTs) deposited by CVD technique. In this work we show a novel approach to develop CNTs tweezers consisting of two arms of vertically aligned CNT ropes that will operate electromechanically. The device was fabricated by optical lithography combined with lift off process. The same fabrication technique has been used to obtain pre patterned catalyst dots on patterned electrodes which results on CNT ropes on predefined locations. These ropes have 3 m in diameter and 35 m in length. The pull in voltage measured on a first prototype was about 20 V for a tweezers gap of 5 m. We calculated the moment of inertia of CNT rope and its average Young’s modulus in order to calculate the pull in voltage of CNT rope tweezers.
机译:本文涉及用碳纳米管(CNT)绳索制造的机电镊子的设计,建模,制造和电学特性。我们使用CVD技术沉积的垂直种植多壁碳纳米管(MWCNT)。在这项工作中,我们展示了一种新颖的方法来开发由垂直对齐的CNT绳索的两个臂组成的CNT镊子,该镊子将能够机电操作。该装置是通过光学光刻制造的,结合升降过程。相同的制造技术已被用于在图案化电极上获得预先图案化的催化剂点,这导致预定位置上的CNT绳索。这些绳索的直径为3米,长度为35米。在第一个原型上测量的压力电压约为20 V,用于5米的镊子间隙。我们计算了CNT绳索的惯性矩及其平均杨氏模量,以便计算CNT绳索镊子的压力。

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