Practical Integrated Design of a Condenser-objective Lens for Transmission Electron Microscope

摘要

A condenser-objective lens is designed through combination of separating and integrating to consider the effect of the front condenser field on its objective performance. A practical lens model including magnetic pole piece, magnetic circuit and coil windings is built to optimize its rear field. The front field can be integrated into the rear one by simply adjusting the position of the specimen and the excitation on the condenser-objective lens. Optical performance of the integrated lens is researched as both a condenser lens and an imaging one. The total aberrations at the specimen plane are 0.01 nm under STEM operation mode and its spherical aberration coefficient is 1.5mm when being an imaging objective lens, which can meet for high resolution microanalysis and TEM imaging.