PHASE PLATE LENS SYSTEM FOR TRANSMISSION ELECTRON MICROSCOPE AND TRANSMISSION ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To enable highly precise alignment of transmission electrons injected into a phase plate.;SOLUTION: An image forming system located on an image side beyond and object lens, having the phase plate 7 arranged behind a rear focal plane 3 of the object lens 2, comprises lens system 4, 5 for imaging on a phase plate plane in such a manner that the position and inclination of electron beams are conjugated with the rear focal plane of the object lens, an alignment coil 6 for directing the electron beams emitted from the lens systems to the phase plate and an alignment coil 8 for directing the electron beams emitted from the phase plate to the following image-formation lens system.;COPYRIGHT: (C)2002,JPO