3-Dimensional Al_2O_3 Fiber Networks using Low Temperature Atomic Layer Deposition on a Cotton Template

摘要

Micro-scale woven structures were replicated 3 dimensionally by conformal coating onto natural woven cotton using a binary reaction of trimethylaluminum and water at 100°C. Even after the woven cotton was removed at 450°C, the woven structures completely remained. Results demonstrate the capability of ALD to penetrate into the complex 3D network structure of natural woven cotton to form uniform coating at low temperature and give insight into general understanding of methodology to translate deposition processes from 2D surface to a 3D network to obtain a uniform coating throughout the sample network bulk. It also shows the possibility of replication of micro-scale structures from highly conformal coatings to give the unique synthesis root of hollow structures.