Sol-Gel Synthesis and Nanostructure Study on Multilayered Ba_(0.7)Gd_(0.3)TiO_3 Thin Films

摘要

Sol-gel synthesized Ba_(0.7)Gd_(0.3)TiO_3 thin films have been fabricated on SiO_2/Si substrate. The grain size and surface morphology for different number of deposited layers have been investigated using SEM and contact-mode AFM. SEM images show that the grain size increases from 77 nm to 94 nm as the number of deposited layers increases from one to four layers, which attributed to the grain growth mechanism during baking and annealing processes. On the other hand, AFM images show a dense, smooth and crack-free surface. However, the surface roughness shows a decreasing trend as the number of deposited layers increases, which attributed to the distribution behavior of the grain during the layer deposition and baking process.