Humidity sensor using nanostructured-multilayered Al-doped ZnO:TiO2 thin films

摘要

electrode pattern (inter-digit Ag electrode) is formed of alumina (Al ₂ O ₃ ) of the two-layer structure on the substrate of titanium oxide / aluminum -doped zinc oxide (TiO ₂ / Al-doped ZnO) and aluminum -doped zinc oxide / titanium (Al-doped ZnO / TiO ₂ ) of the semiconductor film is a sol - gel was prepared by the method , the humidity sensor using the semiconductor thin film to the humidity sensing . The two-layer film has a semiconductor nanoparticle with a porous structure . The thickness of the second thin film layer is 513~587 nm, particle size of the two-layer film is a 11.3~24.6 nm.