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Recent Progress with X-ray Optics Based on Si Wafers and Glass Foils

机译:基于Si晶片和玻璃箔的X射线光学近期进展

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We report on recent progress with development of astronomical X-ray optics based on thermally formed glass foils and on bent Si wafers. Experiments with thermal glass forming have continued adding wider range of evaluated and optimized parameters. Recent efforts with Si wafers have been focused on their quality improvements such as flatness and thickness uniformity in order to better meet the requirements of future X-ray astronomy projects applications, as well as on study of their surface quality, defects analysis, and methods for its reproducible measurement. The role of substrates quality in performance of final mirror arrays, as required by large future space X-ray astronomy experiments was also studied. The problem of increasing size of Si wafers, required for some X-ray optics applications, is also addressed. First results of irradiation tests of selected substrates are also reported and discussed.
机译:我们在基于热形成的玻璃箔和弯曲Si晶片上的天文X射线光学开发的最新进展报告。热玻璃形成的实验继续加入更广泛的评估和优化参数。最近与SI晶片的努力集中在他们的质量改进,如平坦度和厚度均匀性,以便更好地满足未来X射线天文项目应用的要求,以及研究其表面质量,缺陷分析和方法它的可重复测量。还研究了基板质量在最终镜子阵列性能下的作用,如大的未来空间X射线天文实验所要求的。还解决了某些X射线光学应用所需的Si晶片尺寸升高的问题。还报告并讨论了所选衬底的辐照测试的首先结果。

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