Enhancement on Crystallinity Property of Low Annealed PbTi03 Thin Films for Metal-insulator-metal Capacitor.

摘要

This study presents the investigation on crystallinity property of PbTiO_3 thin films towards metal-insulator-metal capacitor device fabrication. The preparation of the thin films utilizes sol-gel spin coating method with low annealing temperature effect. Hence, structural and electrical characterization is brought to justify the thin films consistency.