SIX DEGREES OF FREEDOM MAGNETIC LEVITATION STAGE USING NEW ACTIVE MAGNETIC BEARINGS

摘要

In this paper, a 6-DOF dual-servo stage was proposed. The moving platform is suspended by new Halbach linear active magnetic bearings. Because the HLAMB has zero-stiffness in static and large dynamic force, it is quite advantageous to levitate the fine stage with active vibration isolation. In future, the performance of the 6-DOF positioning stage will be evaluated.