Development of 3-D channels in LTCC for Capillary Cooling Structures for Thermal Management

摘要

3 dimensional (3-D) capillary cooling network is being designed in a LTCC based electron multiplier to handle power levels approaching 6.8 kW/ cm~2. Methods for producing vertical and X-Y channels of various diameters and configurations are discussed. Channels with dimensions as small as 35-50 μm have been realized in all dimensions. The use of capillary cooling reduced both the requirements for pumping power and pumping pressure while reaching theoretical values of 10~5W/ cm~3.