The Chemical-Mechanical Polishing (CMP) Process on the Nd-Doped Phosphate Glass

摘要

The chemical-mechanical polishing process is one of the most efficient techniques in polishing high quality laser glass. This paper discusses the polishing characteristics of Neodymium phosphate laser glass on its chemical components and chemical properties. The effects of the agent particle size, pH, chemical additives, as well as the subsurface damage are discussed at the same time. From the surface physics and chemistry theory, the causes of hazes and eroded in laser glass surface are explained.