Nano Metrology as a Scientific Discipline, in Practical Application and in the Viewpoint of European International Standardisation

摘要

Increases of quality of technical parts and whole products are not to be joined of course exclusively with the increase of accuracy but correlation is given up to a certain extent, particularly if the technical development during the 20th century is taken into consideration. This trend develops presently continuously further on because of the development from microtechnology to nanotechnology, which means particularly special metrologies and production methods for the realization of manufacturing accuracies in the nanometric range