Carbon nanotubes (CNTs) have been grown on silicon nanowires (SiNWs) by chemical vapor deposition using Co catalyst nanoparticles. Single-walled CNTs have been grown mainly when a thin Co film (0.1nm thick) was deposited on SiNWs, while both SWNTs and MWNTs have been grown on SiNWs on which Co 0.5nm thick was deposited. The correlation between the diameter of catalyst nanoparticles and that of CNTs has been investigated by transmission electron microscopy. The average diameter of CNTs is smaller than that of catalyst nanoparticles.
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