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METHODOLOGY FOR STACKING OF POWER SEMICONDUCTORS FOR THE HARSH AUTOMOTIVE ENVIRONMENT

机译:用于堆叠功率半导体的方法,用于苛刻的汽车环境

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Power semiconductors require electrical interconnects to both sides of the die and a highly conductive thermal path. These requirements are typically satisfied by employing wire-bonds whether using direct chip attach to the substrate or a package solution. The wire-bond process is an expensive, serial process which precludes heat sinking from the top-side of the die. Additionally, power semiconductors typically have active circuitry under the metallization of the bond locations making them vulnerable to mechanical damage during the bonding process. A method to achieve the top-side interconnects without the shortcomings of the wire-bond process has been developed that also facilitates vertically stacking of the die. This method of interconnection is compatible with high power devices due to its low thermal resistance. The interconnect hardware, SPDC (Stacked Power Die Contact), is also compatible with existing surface mount process flows and equipment, thus simplifying implementation. The SPDC incorporates traces and vias through a dielectric material that provides the required isolation between the gate and source of a die and the drain of the adjacent die. Reliability testing has demonstrated that this method exceeds the automotive goal of a minimum life of 1000 thermal cycles for temperature extremes of -40 to +150°C.
机译:功率半导体需要电互连到模具的两侧和高导电的热路径。通常通过采用线键来满足这些要求是否使用直接芯片连接到基板或封装溶液。钢丝键合工艺是一种昂贵的串行工艺,其妨碍了从模具的顶部沉入的散热。另外,功率半导体通常在粘合位置的金属化下具有有源电路,使得它们在粘合过程中容易受到机械损坏的影响。已经开发了在没有线键工艺的缺点的情况下实现顶侧互连的方法,其也有助于垂直堆叠模具。这种互连方法由于其低热电阻而与高功率器件兼容。互连硬件SPDC(堆叠电源管芯接触)也与现有的表面安装过程流量和设备兼容,从而简化了实现。 SPDC通过介电材料掺入迹线和通孔,该介质材料提供在模具的栅极和源极和相邻管芯的漏极之间提供所需的隔离。可靠性测试表明,该方法超过了1000个热循环的最小寿命的汽车目标,用于温度极值-40至+ 150°C。

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