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SCALING OF SILICON-BASED DEVICES TO SUBMICRON DIMENSIONS

机译:将基于硅的设备的缩放到亚微米尺寸

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摘要

The purpose of this paper, within the context of the NATO ASI proceedings, is twofold: To describe the competition that advanced functional materials, such as molecular devices, face from existing silicon technology. The new materials and devices must compete with devices fabricated using entrenched semiconductor technology, especially silicon technology. The major problem is that silicon technology is not stationary, but progresses with a relentless momentum. This paper describes the progress in silicon technology from the perspective of scaling to submicron devices, and the expected performance at the end of the 'silicon scaling era.' It is at the end of this scaling era that new molecular electronic devices, such as those described by Kelly, and Sagiv and Cohen, are expected to become commercially viable. These molecular devices must outperform the silicon devices of that era, not the present generation.
机译:本文的目的是在北约ASI诉讼的背景下,是双重的:描述先进的功能材料,例如分子装置,来自现有硅技术的竞争。新的材料和设备必须与使用粘合半导体技术,尤其是硅技术制造的设备竞争。主要问题是硅技术并不静静,但具有不懈的势头。本文介绍了硅技术的进步从缩放到亚微米器件的角度,以及“硅缩放时代”结束时的预期性能。它在该缩放时代结束时,新的分子电子器件,例如由凯莉描述的那些,以及Sagiv和Cohen的结束,预计将成为商业上可行的。这些分子装置必须优于该时代的硅装置,而不是本发明。

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