Co-W magnetic films attracted much interest as one of the candidates for high-density magnetic recording media. In this study, Co-W epitaxial films with various thicknesses and different contents were prepared, and the effects of thickness and content on structure and magnetic anisotropy were investigated. Co_{100-x}W_{x} (x=0, 6, 10, 16) magnetic films (Thickness: 5-50nm) were deposited on MgO (111) single crystal by using DC magnetron sputtering system at 300 deg C. Ru (20nm) films were used as buffer layers. The Ar pressure during sputtering was 5 mTorr. Structure characterization of the films was examined by X-ray diffraction (XRD). Magnetic anisotropy was determined by the magnetization curves measured with a Vibrating sample magnetometer (VSM).
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