LMI-based robust H_∞ control theory for nano feeding under large feeding force

摘要

On the basis of the research on nanometer drive parts under large feeding force and the thermal expansion principle, the nano precision drive parts based on the semiconductor refrigeration equipment was designed. In order to get a better feed precision, considering that the nano feeding under large feeding force has some open air temperature random disturbance phenomenon which influence the feed precision, LMI-based robust H_∞ control scheme was presented. And the LMI-based robust H_∞ control scheme used here can realize the purpose of obtaining a good control of nano feeding under large feeding to enhance the response speed and the robustness. When the open air temperature changes within 0.3 °C, the control precision without LMI-based robust H_∞ control scheme is 15 nm and the control precision under LMI-based robust H_∞ control scheme has arrived within 10 nm. This proves the LMI-based robust H_∞ control feasible and usable.