Properties of humidity sensors with porous Al_2O_3 as a dielectric layer

机译：多孔AL_2O_3作为介电层的湿度传感器的性质

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摘要

The effect of humidity influence on characteristics of a ceramic sensor with a porous dielectric Al_2O_3 layer is presented. Influence of chosen electrolytic process parameters on electrical properties of the sensor is shown. The experimental data of two groups of sensors are interpreted using two, known from literature, electric equivalent circuits.

机译：介绍了湿度对具有多孔电介质AL_2O_3层的陶瓷传感器特性的影响。所示的电解过程参数对传感器电性能的影响。两组传感器的实验数据使用来自文献，电力等效电路的两个来解释。

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《National Conference on Biocybernetics and Biomedical Engineering》|2004年||共6页
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作者
Bogdan Chachulski; Grzegorz Jasinski; Teresa Zajt; Antoni Nowakowski; Piotr Jasinski; SPIE-The International Society for Optical Engineering; SPIE v.5505 and Progress in Biomedical Optics and Imaging v.5 no.31;
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中图分类 N-532;
关键词
humidity ceramic sensor; impedance spectroscopy; electrical equivalent circuit;

机译：湿度陶瓷传感器;阻抗光谱;电力等效电路;

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1. The ceramic MgAl_2O_4-based humidity sensors. 1. The influence of dispersion and grain dimension of the ceramic humidity sensors from the mixture of MgO and Al_2O_3 on their operation characteristics [J] . Vynnyk I.B., Sirotyk M.M., Kovalsky P.M. Порошковая Металлургия . 1998,第5a6期

机译：陶瓷基于MgAl_2O_4的湿度传感器。 1. MgO和Al_2O_3的混合物对陶瓷湿度传感器的色散和晶粒尺寸的影响
2. Interface and electrical properties of buried InGaAs channel MOSFET with an InP barrier layer and Al_2O_3/HfO_2/Al_2O_3 gate dielectrics [J] . Li Yue, Chen Yonghe, Sun Tangyou, Annales de l'I.H.P . 2020,第1期

机译：带有INP屏障层和AL_2O_3 / HFO_2 / AL_2O_3栅极电介质的焊接INGAAS通道MOSFET的界面和电性能
3. Fabrication of porous anodic aluminium oxide layers on paper for humidity sensors [J] . Mamadou Balde, Arnaud Ven, Brice Sorli Sensors and Actuators . 2015,第deca期

机译：在纸张上制造用于湿度传感器的阳极氧化铝多孔层
4. Properties of humidity sensors with porous Al_2O_3 as a dielectric layer [C] . Bogdan Chachulski, Grzegorz Jasinski, Teresa Zajt, National Conference on Biocybernetics and Biomedical Engineering . 2004

机译：多孔AL_2O_3作为介电层的湿度传感器的性质
5. Characterization and tailoring of porous sol -gel dielectrics for interlayer dielectric applications. [D] . Rogojevic, Svetlana. 2001

机译：表征和定制用于层间电介质应用的多孔溶胶-凝胶电介质。
6. Influence of Humidity on the Acoustic Properties of Mushroom Mycelium Films Used as Sensitive Layers for Acoustic Humidity Sensors [O] . Iren Kuznetsova, Boris Zaitsev, Larissa Krasnopolskaya, 2020

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8. DETERMINATION OF THE PROPERTIES OF DIELECTRIC LAYERS ON DIELECTRIC SUBSTRATES BY THE METHOD OF RADIO WAVE ELLIPSOMETRY [R] . SIEGFRIED AUER, JOHN SCHUIT 1975

机译：用无线电波法测定介电基板上介电层的性质

Properties of humidity sensors with porous Al_2O_3 as a dielectric layer

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