Electric Characteristics of Double Convex Lens Type Quartz Resonators on One Quartz Blank

摘要

Objective of this research is to study electric characteristics of double identical two-steps quartz resonators in two concave lens-shapes on one quartz blank, which is shown in another paper (P2FC-G-1 010). After two concave quartz pockets of single-sided inverted mesa type were made on one quartz plate by chemical etching, they were machined from front and rear sides by dual-face polishing table, and we discovered the following five performances. 1. Two concave pockets were found to become identical convex lens shapes, which heights are in the same geometry. 2. The longer two identical concave pockets were machined by the polishing table, the higher those same convex lens-shape blanks were growing stepwise higher with the identical geometry. 3. The deeper the concave blank was polished, the longer the separation between the primary oscillation and secondary and higher ones became step by step, and finally it was found that there existed only primary oscillation. 4. When the quartz plate is etched to two concave pockets chemically by hydrofluoric acid, the damaged amorphous layer becomes approximately 0.2 μm. After the damaged layer was removed by the mechanical polishing, the quartz surface became extremely smooth, and these double resonators were found to be used as a accurate bio-sensor to measure chemical reactions as an allergy-reargin reaction. 5. When the quartz blank was etched chemically by fluorine acid and polished mechanically, this sensor was discovered to show the intrinsic higher electric performance of quartz resonator.