Performance Enhancement of Interdigital Electrode-Piezoelectric Quartz Crystal (IDE-PQC) Salt Concentration Sensor by Increasing the Electrode Area of Piezoelectric Quartz Crystal (PQC)

摘要

In this paper, a new approach to enhance the performance of the interdigital electrode-piezoelectric quartz crystal (IDE-PQC) salt solution concentration sensor by modifying the electrode area of PQC was proposed. Equivalent circuit analysis showed that the static capacitor (C0) which is related to the electrode area of PQC directly affected the response sensitivity of the IDE-PQC sensor. Further, the sensing responses of IDE-PQC sensors to various concentrations of salt solution were measured. Three kinds of salt solution, including NaCl, KCl, and Na2SO4, were adpoted to evaluate the sensing performances of the IDE-PQC sensors. The experimental results also indicated that increasing the electrode area of PQC can enhance the sensitivity response of the IDE-PQC sensors to the change of salt solution concentration. For example, the detection sensitivity of the IDE-PQC sensor with an electrode diameter of 5 mm was about three times larger than that of the sensor with an electrode diameter of 3 mm. Meanwhile, we found that the frequency stability of the IDE-PQC sensor was also improved by increasing the electrode area of PQC. In addition, the influence of the electrode area of PQC on the repeatability and the transient response of IDE-PQC salt solution concentration sensor were also studied. This work demonstrates simple and cost-effective method to achieve the performance enhancement of IDE-PQC salt solution concentration sensor by modifying the electrode area of PQC.