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Characterizing ultra-thin films by laser-acoustics

机译:通过激光声学表征超薄薄膜

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For protecting against damage, computer hard disks have to be coated by hard films. The increasing data density requires reducing the film thickness down to few nano-meters due to the decreasing distance between the write-read head and the disk. This can only be realized using ultra-thin films of enhanced performance for wear and corrosion protecting. The excellent properties of amorphous carbon films termed diamond-like carbon (DLC) have turned to be suitable for this application. The mechanical testing of these ultra-thin and super-hard films is a challenge for the available test methods. Efforts have been done to adapt the laser-acoustic method to the requirements of testing ultra-thin films. The laser-acoustic method yields the Young's modulus, revealing the effect of varying bonding structure of the material, porosity and other micro-defects, including insufficient adhesion. For diamond-like carbon material, Young's modulus correlates with the fraction of tetrahedral sp{sup}3-bonds causing its high hardness and excellent wear behavior. The films were deposited by high current pulsed vacuum arc discharges. The effects of the substrate temperature during the deposition and the film thickness were studied. The minimum film thickness was less than 3 nm.
机译:为了防止损坏,计算机硬盘必须由硬膜涂覆。由于写入读取头和盘之间的距离降低,增加的数据密度需要将薄膜厚度降低至少量纳米米。这只能使用超薄薄膜来实现增强性能的磨损和腐蚀保护。无定形碳膜称为金刚石状碳(DLC)的优异性质转身适用于本申请。这些超薄和超硬膜的机械测试是可用测试方法的挑战。已经努力使激光声学方法适应测试超薄薄膜的要求。激光声学方法产生杨氏模量,揭示了材料,孔隙率和其他微缺陷的不同粘接结构的效果,包括粘附不足。对于菱形碳材料,杨氏模量与四面体SP {SUP} 3键的分数相关,导致其高硬度和优异的磨损行为。通过高电流脉冲真空电弧放电沉积薄膜。研究了衬底温度在沉积期间和膜厚度的影响。最小膜厚度小于3nm。

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