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ELECTRIC FORCE MICROSCOPY INVESTIGATION OF THICK FILM RESISTORS

机译:电力显微镜调查厚膜电阻

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Electric Force Microscopy was used to map the electric field distribution on the surface of thick film resistors (TFRs) based on Bi-ruthenate, Pb-ruthenate and RuO{sub}2; the evolution of the microstructure with the firing conditions has been investigated in some samples. The concentration of the electric field around the conductive grains is a general feature of all the films, independently of the resistor composition. Then a meander-like path of charge carriers on a microscopic scale has been assessed. The segregated structure is enhanced at high firing temperatures. A strict correlation between the distribution of the electric field and the size of the constituents in the paste was not clearly obtained. The results are discussed in connection with the electrical and piezoresistive properties of TFRs.
机译:用于基于双钌酸盐,Pb钌酸盐和ruo {sub} 2将电力显微镜映射厚膜电阻器(TFRs)表面上的电场分布;在一些样品中研究了与烧制条件的微观结构的演变。导电晶粒周围的电场的浓度是所有薄膜的一般特征,独立于电阻器组合物。然后,已经评估了微观规模上的电荷载波的蜿蜒相同的路径。在高烧制温度下,分离的结构增强。没有清楚地获得电场分布与浆料中成分的尺寸之间的严格相关性。结果与TFRS的电气和压阻性性质有关。

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