Zinc Self-diffusion in Isotopic Heterostructured Zinc Oxide Thin Films

摘要

Zinc isotopic heterostructured zinc oxide thin films of ~64ZnO/~68ZnO/~64ZnO were synthesized using pulsed laser deposition. The pulsed laser was first irradiated onto a polycrystalline target of 64Zn0 to deposit the ~64Zn0 layer, then onto the ~68Zn0 target to prepare the~68 ZnO layer and finally, the ~64Zn0 target was used again. The 64ZnO/~68ZnO/64ZnO layered thin film was thus obtained. The thin films were annealed at various diffusion annealing temperatures. Diffusion profiles of the zinc isotopes due to the annealing were evaluated using secondary ion mass spectrometry (SIMS). The diffusion coefficients were slightly higher near the interface between the thin film and the substrate (the inner region) compared to the near surface (the outer region).