コロナ放電式イオナイザ直下における凝縮性有機物質のウエーハ表面吸着挙動その1：TCEPとP付着量の比較

摘要

Recently, in a general indoor environment and a cleanroom of semiconductor manufacture, it is one of the most important factor to control the gaseous organic substance. On the other hand, in general indoor environment, an air cleaner and air conditioning unit of type generating air ion increase. In a cleanroom, a corona discharge type air ionizer generated plus and minus air ion is used as countermeasure of ESA and ESD. Therefore atmospheric ion reacted to a gaseous organic compound and thought that new contaminants were generated. In this report, we conducted the experiment that exposed a wafer in chamber. Results was as follows 1) The distance and voltage between electrode and wafer influenced TCEP concentration of wafer surface 2) When the ionizer was operated in the positive mode, TCEP concentration increased in case of the low voltage between electrode