Silicon-Organic Hybrid Photonics: Integration of Electro-Optical Polymers in a Photonic Integrated Circuit Technology

摘要

In this work, we present recent results on the hybrid integration of electro-optical organic materials in a photonic integrated circuit (PIC) technology. We review some of the identified challenges regarding process compatibility and present preliminary results on the integration of organic materials in a PIC technology using a 0.25 μm SiGe BiCMOS pilotline. Here, we are focusing on electro-optical applications towards high-speed modulators with ultra-low energy consumption.