WAFER FAB CYCLE TIME MANAGEMENT USING MES DATA

摘要

A critical factor for most wafer fab managers is maintaining acceptable cycle times. In the highly variable environment of a wafer fab, this is no small task. Batch processing, tool dedication, unreliable equipment, setups, rework, and hot lots all conspire to drive cycle times upward. To combat these factors, we propose a methodology for cycle time management based on extracting real-time data from the manufacturing execution system (MES). We use the MES data to identify problems on the shop floor, and then draw on our experience in cycle time management to recommend improvement strategies. We first review the cycle time management information that can be derived from lot move data alone. Next, we highlight other improvement areas for which additional MES data must be collected. Finally, we indicate the point at which users must turn to simulation to perform further what-if analysis.