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Combining statistical analysis and artificial neural network for classifying jobs and estimating the cycle times in wafer fabrication

机译:结合统计分析和人工神经网络对工作进行分类并估算晶圆制造中的周期时间

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摘要

Estimating the cycle time of a job is meaningful in many ways for managing a wafer fabrication factory (wafer fab). However, this estimation is not easy, due to the complexity and uncertainty of the wafer fabrication environment. Recently, a number of hybrid methods have been proposed to improve the accuracy of estimating the cycle time of a job. Most of these methods used job classification, especially pre-classification. Among these methods, several were based on post-classification and achieved even better performances. Such post-classification-based methods were improved in this study by considering the required parameter adjustment instead of the estimation error. Thus, it is possible to classify jobs into more than two categories at the same time. From the view of neurocomputing, this study established a systematic and effective procedure to divide the input examples to an artificial neural network into several parts that can be better handled by different artificial neural networks. A real case was also used to illustrate the applicability of the proposed methodology. The effectiveness of the proposed methodology over several existing methods has been confirmed by statistical tests.
机译:估计作业的周期时间对于管理晶圆制造厂(晶圆厂)有很多意义。然而,由于晶片制造环境的复杂性和不确定性,这种估计并不容易。最近,已经提出了许多混合方法来提高估计作业周期的准确性。这些方法大多数使用工作分类,尤其是预分类。在这些方法中,有几种是基于后分类的,并且取得了更好的性能。通过考虑所需的参数调整而不是估计误差,改进了这种基于分类后的方法。因此,可以同时将作业分类为两个以上的类别。从神经计算的角度出发,本研究建立了系统有效的程序,将输入示例划分为一个人工神经网络,可以将其分为几个部分,这些部分可以由不同的人工神经网络更好地处理。一个实际案例也被用来说明所提出方法的适用性。统计测试证实了所提出的方法相对于几种现有方法的有效性。

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