EDGE SUPPORTED ZnO THIN FILM BULK ACOUSTIC WAVE RESONATORS AND FILTER DESIGN

摘要

Edge supported ZnO thin film bulk acoustic wave resonators of different areas were fabricated using both Al and Au/Cr electrodes and their high frequency response characteristic characterized by S-parameters measurement. The development of an equivalent circuit for the composite resonator lead to an understanding of the dependency on device area and electrode material. The use of varying resonator area in ladder niter desing is discussed.