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Characteristics of ZnO Thin Film by Atomic Layer Deposition for Film Bulk Acoustic Resonator

机译：薄膜体声谐振器原子层沉积ZnO薄膜的特性

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S. G. Kim; S. B. Jung; J. H. Oh; H. J. Kim; Y. H. Shin;
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1. Improvement of the crystallinity of ZnO thin films and frequency characteristics of a film bulk acoustic wave resonator by using an Ru buffer layer and annealing treatment [J] . Kim EK, Lee TY, Hwang HS, Superlattices and microstructures . 2006,第1a4期

机译：通过使用Ru缓冲层和退火处理来改善ZnO薄膜的结晶度和薄膜压电谐振器的频率特性
2. Optical and structural characterization of ZnO thin films and fabrication of bulk acoustic wave resonator (BAW) for the realization of gas sensors by stacking ZnO thin layers fabricated by e-beam evaporation and rf magnetron sputtering techniques [J] . Atanas JP, Al Asmar R, Khoury A, Sensors and Actuators, A. Physical . 2006,第1期

机译：ZnO薄膜的光学和结构表征以及通过堆叠由电子束蒸发和射频磁控溅射技术制成的ZnO薄层来实现气体传感器的体声波谐振器（BAW）的制造
3. Improvement of crystallinity of ZnO thin film and electrical characteristics of film bulk acoustic wave resonator by using Pt buffer layer [J] . Yamada H, Ushimi Y, Takeuchi M, Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2004,第3a4期

机译：通过使用Pt缓冲层改善ZnO薄膜的结晶度和薄膜压电谐振器的电特性
4. Characteristics of ZnO Thin Film by Atomic Layer Deposition for Film Bulk Acoustic Resonator [C] . S. G. Kim, S. B. Jung, J. H. Oh, International Symposium on Designing, Processing and Properties of Advanced Engineering Materials(ISAEM 2003) pt.2; 20031105-20031108; Jeju Island; KR . 2003

机译：薄膜体声谐振器原子层沉积ZnO薄膜的特性
5. Plasma enhanced atomic layer deposition ZnO thin film transistors for large area circuit applications. [D] . Li, Yuanyuan. 2013

机译：用于大面积电路应用的等离子增强原子层沉积ZnO薄膜晶体管。
6. On the transformation of zincone-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition [O] . Alberto Perrotta, Julian Pilz, Stefan Pachmajer, 2019

机译：次饱和等离子体增强原子层沉积法将锌酮样转变为多孔ZnO薄膜
7. Effective Oxygen-Defect Passivation in ZnO Thin Films Prepared by Atomic Layer Deposition Using Hydrogen Peroxide [O] . Yue Wang, Kyung-Mun Kang, Minjae Kim, 2019

机译：使用过氧化氢原子层沉积制备的ZnO薄膜中的有效氧缺陷钝化
8. Dual Mode Thin Film Bulk Acoustic Resonators (FBARs) Based on AlN, ZnO and GaN Films with Tilted c-Axis Orientation [R] . Wang, Q. 2010

机译：基于具有倾斜c轴取向的alN，ZnO和GaN薄膜的双模薄膜体声波谐振器（FBaR）

Characteristics of ZnO Thin Film by Atomic Layer Deposition for Film Bulk Acoustic Resonator

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