Integration of the fabrication processes and wafer level packaging of optical MEMS devices using localized induction heating

摘要

This paper reports a new method for the integration of fabrication processes and wafer level packaging of optical MEMS device. The electroplated magnetic thick film was employed to realize the localized heating assisted wafer level package. Due to the solder reflow and electroplating technique, hermetic seal of the packaged device is achieved. In addition, the electroplated thick film also performed as a spacer. In applications, the integration the MUMPs devices with the proposed packaging techniques were demonstrated.