On laser precision machining of materials for micro-fabrication applications

摘要

A through understanding of the interactions between the various subsystems and components of a laser precision machining system is required to attain high accuracy and small feature sizes in the part fabrication. This paper presents our results on the precision machining of small features in various materials using diode pumped solid state lasers. Machining parameters relevant to motion system and tool path compensation are discussed along with their relevance to the machined feature geometry. The effect of laser beam polarization on the machined feature geometry is also described.