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Laser machining of transparent brittle materials: from machining strategies to applications

机译:透明脆性材料的激光加工:从加工策略到应用

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摘要

Transparent brittle materials such as glass and sapphire are widely concerned and applied in consumer electronics, optoelectronic devices, etc. due to their excellent physical and chemical stability and good transparency. Growing research attention has been paid to developing novel methods for high-precision and high-quality machining of transparent brittle materials in the past few decades. Among the various techniques, laser machining has been proved to be an effective and flexible way to process all kinds of transparent brittle materials. In this review, a series of laser machining methods, e.g. laser full cutting, laser scribing, laser stealth dicing, laser filament, laser induced backside dry etching (LIBDE), and laser induced backside wet etching (LIBWE) are summarized. Additionally, applications of these techniques in micromachining, drilling and cutting, and patterning are introduced in detail. Current challenges and future prospects in this field are also discussed.
机译:透明的脆性材料,例如玻璃和蓝宝石,由于其优异的物理和化学稳定性以及良好的透明性而受到广泛关注并应用于消费类电子产品,光电设备等。在过去的几十年中,越来越多的研究注意力集中在开发用于透明脆性材料的高精度和高质量加工的新方法上。在各种技术中,激光加工被证明是加工各种透明脆性材料的有效且灵活的方法。在这篇评论中,一系列的激光加工方法,例如总结了激光全切割,激光划片,激光隐形切割,激光丝,激光诱导的背面干法蚀刻(LIBDE)和激光诱导的背面湿法蚀刻(LIBWE)。另外,详细介绍了这些技术在微加工,钻孔和切割以及构图中的应用。还讨论了该领域的当前挑战和未来前景。

著录项

  • 来源
    《光电进展(英文)》 |2019年第001期|P.11-23|共13页
  • 作者单位

    [1]Laser Micro/Nano Processing Lab, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China;

    [2]Department of Experimental Teaching, Guangdong University of Technology, Guangzhou 510006, China;

    [1]Laser Micro/Nano Processing Lab, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China;

    [1]Laser Micro/Nano Processing Lab, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China;

    [1]Laser Micro/Nano Processing Lab, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China;

    [1]Laser Micro/Nano Processing Lab, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 CHI
  • 中图分类 无线电电子学、电信技术;
  • 关键词

    transparent brittle materials; glass; sapphire; laser machining;

    机译:透明脆性材料;玻璃;蓝宝石;激光加工;
  • 入库时间 2022-08-19 04:28:28
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