A method for the precision machining of transparent materials by means of pulsed laser radiation

摘要

A method for the precision machining of surfaces of transparent materials by the application of pulse laser radiation on the of the incident laser radiation opposite side of a transparent material, wherein the shape of the laser beam by a use of a beam shaping element in relation to a cross-sectional shape, size, power density distribution or a pulse shape is selected or adjusted and the shaped laser beam passes through the transparent material, characterized in that the laser beam (6) when it emerges from the transparent material (2) to a the laser radiation absorbing adsorbing layer, which the beam entrance side opposite surface (4) of the transparent material, acts as a result of which a well-defined material removal of the transparent material having a uniform depth distribution is brought about, and by means of a relative movement (12) of the shaped laser beam (9) and / or of the transparent material (2) by a control means (13) is determined in accordance with the processing target, the removal of material can be controlled locally, as a result of which the transparent material, a defined surface shape.