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Expoxy cure monitoring with an interdigitated gate electrode field effect transistor (IGEFET)

机译:用互脱栅电极场效应晶体管(ISFET)的环氧固化监测

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An interdigitated gate electrode field-effect transistor (IGEFET) was designed, fabricated and used to monitor the cure of a common epoxy. The IGEFET sensor consists of an interdigitated gate electrode structure which is coupled to the gate contact of a conventional metal-oxide-semi-conductor field-efffect transistor (MOSFET). The epoxy was deposited on the interdigitated gate electrode, and the IGEFET's electrical performance was observed as the epoxy cured. The cross-linking chemical reaction during epoxy cure caused electrical impedance changes that were quantified when the IGEFET was operated with a periodic voltage pulse signal. Charge transferred through the chemically-active epoxy is manifested as a temporally-dependent potential applied to the MOSFET's gate contact. By operating the MOSFET as a linear amplifier, a potential corresponding to the temporally-dependent gate voltage was directly measured at the amplifier's output. The Fourier transform of the IGEFET's time-domain response at specific time increments was computed. The resulting epoxy cure spectra were compared to a reproducible baseline spectrum, and an ensemble of difference spectra were computed to reveal the epoxy's chemical state at specific instances of time. The difference spectra features yield valuable information concerning the state of the epoxy's cure.
机译:设计,制造和用于监测常见环氧树脂的固化和用于监测常见的栅电极场效应晶体管(IGEDET)。 IGEFET传感器由交叉区栅电极结构组成,该栅电极结构耦合到传统的金属氧化物半导体场 - EffFect晶体管(MOSFET)的栅极接触。将环氧树脂沉积在叉指栅电极上,并观察到IGEDET的电气性能作为环氧树脂固化。环氧固化期间的交联化学反应导致在通过周期性电压脉冲信号操作时量化的电阻抗变化。通过化学活性环氧树脂转移的电荷显示为适用于MOSFET栅极接触的时间依赖性电位。通过操作MOSFET作为线性放大器,在放大器的输出处直接测量对应于时间依赖性栅极电压的电位。计算了IGEDET的傅里叶的时域响应以特定时间增量的傅里叶变换。将得到的环氧固化光谱与可重复的基线谱进行比较,并且计算差异光谱的集合以在特定时间情况下揭示环氧树脂的化学状态。差异光谱特征能够产生关于环氧树脂固化状态的有价值的信息。

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